趙前程
人物履歷
科研/教育經歷 北京大學工學院 博士； 北京大學信息科學技術學院 博士後/工程師/高級工程師；北京大學集成電路學院 正高級工程師。
研究領域
研究成果
從事微機電慣性技術研究，在MEMS陀螺及加速度計的結構設計、製造工藝、封裝技術、信號處理及測試等方面均有深入研究，所設計的MEMS陀螺和加速度計性能達到國內外先進行列。主持國家重點實驗室基金3項，主持領域基金2項，主持教育部聯合基金1項，作為專題負責人參加973項目，作為子課題負責人參加國家重點研發計劃項目，作為合作項目負責人參加自然科學基金重點基金項目硅曲面結構諧振陀螺研究，作為主要完成人參與國家預研項目、航天支撐項目多項。以第一作者和合作作者在國際著名學術期刊、國內核心學術期刊、國內外重要學術會議等上發表研究論文50餘篇，發明專利30項。
學術成果
論文
- [1]. J.Cui, Q.Zhao* and G.Yan，Effective bias warm-up time reduction for MEMS gyroscopes based on active suppression of the coupling stiffness, MICROSYST NANOENG, vol. 5, (no. 1), pp. 18, 2019-01-01.
- [2]. J. Cui, Guizhen Yan, Qiancheng Zhao*, Enhanced Temperature Stability of Scale Factor in MEMS Gyroscope Based on Multi Parameters Fusion Compensation Method, Measurement 2019.
- [3]. Chunhua HE, Jimeng ZHANG, Qiancheng ZHAO*, Zhenchuan YANG , Dacheng ZHANG & Guizhen YAN. An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control, Science China Information Sciences2017. Vol. 60 (4).
- [4]. HE Chunhua，QC Zhao*，QW Huang，LT Lin，ZC Yang. A novel robust design method for the sense mode of a MEMS vibratory gyroscope based on Fuzzy reliability and Taguchi design, Science China Technological Sciences2017 60 (2) :317-324.
- [5]. He CH, Liu DC, Zhao QC*, En YF, YangZC, Zhang DC, Yan GZ. A novel narrow-band force rebalance control method for the sense mode of MEMS vibratory gyroscopes, Measurement, 2015, 62: 197~204.
- [6]. C.H.He, Q.C.Zhao*, Q.W. Huang, A MEMS Vibratory Gyroscope with Real-time Mode- matching and Robust Control for the Sense Mode, IEEE Sensors J.2015,15 (4): 2069-2077.
- [7].Liu,Dachuan;He,Chunhua;Zhao,Qiancheng*;Yang,Zhenchuan;Hao,Yilong;Yan,Guizhen, Digital signal processing for a micromachined vibratory gyroscope based on a three dimensional adaptive filter demodulator, Measurement, 2014, 50(1): 198~202.
- [8]. Jian Cui, Qiancheng Zhao*, Yinpeng Wang and Guizhen Yan,Shortening bias warm-up time with active control of the coupling stiffness for MEMS gyroscopes, TRANSDUCERS 2019, Berlin, Germany, 2019.6.23-2019.6.27.
- [9]. Jian Cui，Qiancheng Zhao*，Zesen Bai，Guizhen Yan，AN 8PPM/°Ctemperature sensitivity of the scale factor in mems gyroscope based on multi parameters fusion compensation method, IEEE MEMS 2019 Seoul，Koera.
- [10]. C.H.He; Y.P.Wang; Q.C.Zhao*, Research on the packaging reliability and degradation models of quality factors for a high vacuum sealed MEMS gyroscope, Transducers 2017, 2017.6.18-6.22.
- [11]. M.J. Li; Y.P. Wang; Q.C.Zhao*;C.H.He; L.T.Lin; J.F.Yang; G.Z.Yan, Study on the influence induced by electrical couplingamong interconnection lines in MEMS gyroscopes, Transducers2017.
- [12]. QiangQin,QianchengZhao*,FangYang, Dacheng Zhang, Guizhen Yan, A Novel Method to Measure the Sidewall Angle of MEMS Structures, IEEE SENSORS 2017.
- [13]. Cui Jian; Zhao Qiancheng*, Bias thermal stability improvement of MEMS gyroscope with quadrature motion correction and temperature self-sensing compensation, MICRO & NANO LETTERS
- [14]. Cui, Jian; Liu, Mengxia; Yang, Haibing; Li, Dong; Zhao, Qiancheng*, Temperature Robust Silicon Resonant Accelerometer with Stress Isolation Frame Mounted on Axis-Symmetrical Anchors, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
- [15]. Liu, Meng-Xia; Qin, Qiang; Dong, Xian-Shan; Cui, Jian; Zhao, Qian-Cheng*, Characterization of thermal mismatch stress of micro-inertial devices based on silicon-glass bonding process, Optics and Precision Engineering 2020
- [16]. Yang, Haibing; Cui, Jian; Zhao, Qiancheng*, A Wheeled Horizontal Dual-Axis MEMS Gyroscope Based on Single Proof Mass with Mechanical Coupling Suppression Silicon Gratings, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020[1]
參考資料
[17]. J. Cui ； Q. Zhao*, A Tactical-Grade Monolithic Horizontal Dual-Axis Mems Gyroscope Based On Off-Plane Quadrature Coupling Suppression Silicon Gratings, MEMS 2021, pp.814-817. [18]. 劉夢霞,趙前程*,崔健, 梳齒結構與振動梁複合的硅微諧振式加速度計非線性振動特性, 光學精密工程, 2020(5). [19]. 劉夢霞,秦強,董顯山,崔健,趙前程*，基於硅-玻璃鍵合工藝的微慣性器件的材料熱失配應力表徵，光學精密工程,2020(8).