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赵前程

赵前程
北京大学集成电路学院

赵前程，男，北京大学集成电路学院工程师。

目录

人物履历

科研/教育经历 北京大学工学院 博士； 北京大学信息科学技术学院 博士后/工程师/高级工程师；北京大学集成电路学院 正高级工程师。

研究领域

研究成果

从事微机电惯性技术研究，在MEMS陀螺及加速度计的结构设计、制造工艺、封装技术、信号处理及测试等方面均有深入研究，所设计的MEMS陀螺和加速度计性能达到国内外先进行列。主持国家重点实验室基金3项，主持领域基金2项，主持教育部联合基金1项，作为专题负责人参加973项目，作为子课题负责人参加国家重点研发计划项目，作为合作项目负责人参加自然科学基金重点基金项目硅曲面结构谐振陀螺研究，作为主要完成人参与国家预研项目、航天支撑项目多项。以第一作者和合作作者在国际著名学术期刊、国内核心学术期刊、国内外重要学术会议等上发表研究论文50余篇，发明专利30项。

学术成果

论文

  • [1]. J.Cui, Q.Zhao* and G.Yan，Effective bias warm-up time reduction for MEMS gyroscopes based on active suppression of the coupling stiffness, MICROSYST NANOENG, vol. 5, (no. 1), pp. 18, 2019-01-01.
  • [2]. J. Cui, Guizhen Yan, Qiancheng Zhao*, Enhanced Temperature Stability of Scale Factor in MEMS Gyroscope Based on Multi Parameters Fusion Compensation Method, Measurement 2019.
  • [3]. Chunhua HE, Jimeng ZHANG, Qiancheng ZHAO*, Zhenchuan YANG , Dacheng ZHANG & Guizhen YAN. An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control, Science China Information Sciences2017. Vol. 60 (4).
  • [4]. HE Chunhua，QC Zhao*，QW Huang，LT Lin，ZC Yang. A novel robust design method for the sense mode of a MEMS vibratory gyroscope based on Fuzzy reliability and Taguchi design, Science China Technological Sciences2017 60 (2) :317-324.
  • [5]. He CH, Liu DC, Zhao QC*, En YF, YangZC, Zhang DC, Yan GZ. A novel narrow-band force rebalance control method for the sense mode of MEMS vibratory gyroscopes, Measurement, 2015, 62: 197~204.
  • [6]. C.H.He, Q.C.Zhao*, Q.W. Huang, A MEMS Vibratory Gyroscope with Real-time Mode- matching and Robust Control for the Sense Mode, IEEE Sensors J.2015,15 (4): 2069-2077.
  • [7].Liu,Dachuan;He,Chunhua;Zhao,Qiancheng*;Yang,Zhenchuan;Hao,Yilong;Yan,Guizhen, Digital signal processing for a micromachined vibratory gyroscope based on a three dimensional adaptive filter demodulator, Measurement, 2014, 50(1): 198~202.
  • [8]. Jian Cui, Qiancheng Zhao*, Yinpeng Wang and Guizhen Yan,Shortening bias warm-up time with active control of the coupling stiffness for MEMS gyroscopes, TRANSDUCERS 2019, Berlin, Germany, 2019.6.23-2019.6.27.
  • [9]. Jian Cui，Qiancheng Zhao*，Zesen Bai，Guizhen Yan，AN 8PPM/°Ctemperature sensitivity of the scale factor in mems gyroscope based on multi parameters fusion compensation method, IEEE MEMS 2019 Seoul，Koera.
  • [10]. C.H.He; Y.P.Wang; Q.C.Zhao*, Research on the packaging reliability and degradation models of quality factors for a high vacuum sealed MEMS gyroscope, Transducers 2017, 2017.6.18-6.22.
  • [11]. M.J. Li; Y.P. Wang; Q.C.Zhao*;C.H.He; L.T.Lin; J.F.Yang; G.Z.Yan, Study on the influence induced by electrical couplingamong interconnection lines in MEMS gyroscopes, Transducers2017.
  • [12]. QiangQin,QianchengZhao*,FangYang, Dacheng Zhang, Guizhen Yan, A Novel Method to Measure the Sidewall Angle of MEMS Structures, IEEE SENSORS 2017.
  • [13]. Cui Jian; Zhao Qiancheng*, Bias thermal stability improvement of MEMS gyroscope with quadrature motion correction and temperature self-sensing compensation, MICRO & NANO LETTERS
  • [14]. Cui, Jian; Liu, Mengxia; Yang, Haibing; Li, Dong; Zhao, Qiancheng*, Temperature Robust Silicon Resonant Accelerometer with Stress Isolation Frame Mounted on Axis-Symmetrical Anchors, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
  • [15]. Liu, Meng-Xia; Qin, Qiang; Dong, Xian-Shan; Cui, Jian; Zhao, Qian-Cheng*, Characterization of thermal mismatch stress of micro-inertial devices based on silicon-glass bonding process, Optics and Precision Engineering 2020
  • [16]. Yang, Haibing; Cui, Jian; Zhao, Qiancheng*, A Wheeled Horizontal Dual-Axis MEMS Gyroscope Based on Single Proof Mass with Mechanical Coupling Suppression Silicon Gratings, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020[1]

参考资料

  1. ↑ 北京大学集成电路学院

[17]. J. Cui ； Q. Zhao*, A Tactical-Grade Monolithic Horizontal Dual-Axis Mems Gyroscope Based On Off-Plane Quadrature Coupling Suppression Silicon Gratings, MEMS 2021, pp.814-817. [18]. 刘梦霞,赵前程*,崔健, 梳齿结构与振动梁复合的硅微谐振式加速度计非线性振动特性, 光学精密工程, 2020(5). [19]. 刘梦霞,秦强,董显山,崔健,赵前程*，基于硅-玻璃键合工艺的微惯性器件的材料热失配应力表征，光学精密工程,2020(8).

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