劉 霞
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劉 霞，女， 北京理工大學教授。
目錄
[隱藏]人物簡歷
教育背景
2011.09-2017.06，清華大學，電子科學與技術，工學博士（優秀博士論文一等獎）
2012.09-2013.10，美國加州大學伯克利分校，機械工程，聯合培養博士生（國家留學基金委全額資助）
2007.09-2011.06，合肥工業大學，電子科學與技術，工學學士（免試保送清華讀博）
教學經歷
擔任研究生課程《納米電子器件與應用》（全英文），本科生《納米電子器件》（全英文）和本科生《電路與模擬電子學》。
研究方向
先進微納工藝，掃描熱探針技術，納米曲面加工，原子製造，新型信息電子器件，集成電路，低維半導體材料
學術成果
期刊論文
18.
Xia Liu,* Berke Erbas, Ana Conde-Rubio, Norma Rivano, Zhenyu Wang, Jin Jiang, Siiri Bienz, Naresh Kumar, Thibault Sohier, Marcos Penedo, Mitali Banerjee, Georg Fantner, Renato Zenobi, Nicola Marzari, Andras Kis, Giovanni Boero, Juergen Brugger, Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs. Nature Communications 2024, 15, 6934. https://doi.org/10.1038/s41467-024-51165-4
20. Berke Erbas, Ana Conde-Rubio,* Xia Liu,* Joffrey Pernollet, Zhenyu Wang, Arnaud Bertsch, Marcos Penedo, Georg Fantner, Mitali Banerjee, Andras Kis, Giovanni Boero, Juergen Brugger,* Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification, Microsystems & Nanoengineering 2024, 10, 28.
19. Mohammadreza Rostami, Aleksandra Markovic, Ya Wang, Joffrey Pernollet, Xiaosheng Zhang, Xia Liu,* and Juergen Brugger, Multi- and Gray-Scale Thermal Lithography of Silk Fibroin as Water-Developable Resist for Micro and Nanofabrication, Advanced Science 2024, 11, 2303518.
18. Sadegh Kamaei, Xia Liu, Ali Saeidi, Yingfen Wei, Carlotta Gastaldi, Juergen Brugger, Adrian M. Ionescu, Ferroelectric gating of two-dimensionalsemiconductors for the integration of steep-slope logic and neuromorphic devices, Nature Electronics 2023, 6, 658–668. https://doi.org/10.1038/s41928-023-01018-7
17. Wei Xu, Xiuhan Li*, Juergen Brugger, Xia Liu*, Study of the enhanced electricity output of a sliding droplet-based triboelectric nanogenerator for droplet sensor design, Nano Energy 2022, 98, 107166.
16. Ana Conde-Rubio,* Xia Liu, Giovanni Boero, and Jürgen Brugger, Edge-Contact MoS2 Transistors Fabricated Using Thermal Scanning Probe Lithography, ACS Appl. Mater. Interfaces 2022, 14, 42328−42336.
15. Xia Liu*, Arnob Islam, Ning Yang, Bradley Odhner, Mary Anne Tupta, Jing Guo, Philip X.-L. Feng*, Atomic Layer MoTe2 Field-Effect Transistors and Monolithic Logic Circuits Configured by Scanning Laser Annealing. ACS Nano 2021, 15, 12, 19733–19742.
14. Xia Liu, Samuel Tobias Howell, Ana Conde-Rubio, Giovanni Boero, and Juergen Brugger*, Thermomechanical nanocutting of 2D materials. Advanced Materials 2020, 2001232. (EPFL學校官網頭條新聞：https://actu.epfl.ch/news/epfl-researchers-cut-atom-sized-patterns-into-2d-m/)
13. Xia Liu, Arnob Islam, Jing Guo, Philip X.-L. Feng*, Controlling polarity of MoTe2 transistors for monolithic complementary logic via Schottky contact engineering. ACS Nano 2020, 14, 2, 1457–1467.
12. Xia Liu, Amit Kumar Sachan, Samuel Tobias Howell, Ana Conde-Rubio, Giovanni Boero, Renato Zenobi, Jürgen Brugger*, Thermomechanical Nanostraining of Two-Dimensional Materials. Nano Letters 2020, 20, 11, 8250–8257. (EPFL學校官網頭條新聞：https://actu.epfl.ch/news/altering-the-properties-of-2d-materials-at-the-nan/)
11. Xia Liu, Jing Ma, Xiaoming Wu, Liwei Lin, Xiaohong Wang*, Polymeric nanofibers with ultrahigh piezoelectricity via self-orientation of nanocrystals. ACS Nano 2017, 11(2), 1901–1910. (清華大學新聞：https://news.tsinghua.edu.cn/info/1007/54151.htm)
10. Xia Liu, Hui Zhao, Yingxian Lu, Song Li, Liwei Lin, Yanan Du, Xiaohong Wang*, In vitro cardiomyocyte-driven biogenerator based on aligned piezoelectric nanofibers, Nanoscale 2016, 8, 7278–7286.
9. Xia Liu, Si Chen, Juan Pu, Xiaohong Wang*. A Flexible all-solid-state micro supercapacitor and its application in electrostatic energy management system, Journal of Microelectromechanical Systems 2016, 25(5), 929–936.
8. Xia Liu, Maoyun Deng, Xiaohong Wang*. Nanoscale domain imaging and local piezoelectric coefficient d33 studies of single piezoelectric polymeric nanofibers, Materials Letters 2017, 189, 66–69.
7. Xia Liu, Xuanlin Kuang, Sixing Xu, Xiaohong Wang*. High-sensitivity piezoresponse force microscopy studies of single polyvinylidene fluoride nanofibers, Materials Letters 2017, 191:189–192.
6. Xia Liu, Sixing Xu, Xuanlin Kuang, Xiaohong Wang*. Ultra-long MWCNTs highly oriented in electrospun PVDF/MWCNT composite nanofibers with enhanced β phase, RSC Advances 2016, 6, 106690–106696.
5. Xia Liu, Sixing Xu, Xuanlin Kuang, Daxin Tan, Xiaohong Wang*. Nanoscale investigations on β-phase orientation, piezoelectric response, and polarization direction of electrospun PVDF nanofibers, RSC Advances 2016, 6, 109061–109066.
4. Xia Liu, Xiaohong Wang*, Hui Zhao, Yanan Du. Myocardial cell pattern on piezoelectric nanofiber mats for energy harvesting, Journal of Physics Conference Series 2014, 557, 012057.
3. Xia Liu, Xiaohong Wang, Xiaoming Wu, Zhixiong Zhang, Yuanxi Zhang. The synergistic effect of periodic immunomagnetics and microfluidics on universally capturing circulating tumor cells, Microsystem Technologies 2014, 20(7):1337-1344.
2. Xia Liu, Xiaohong Wang*. 3D cardiac cell culture on nanofiber bundle substrates to investigate cell morphology and contraction, Micromachines 2017, 8(5): 147.
1. Kaidi Li, Xia Liu, Yifeng Liu, Xiaohong Wang*. A piezoelectric generator based on PVDF/GO nanofiber membrane, Journal of Physics: Conference Series 2018, 1052, 012110.
會議論文
14.
Sadegh Kamaei, Ali Saeidi, Xia Liu, Carlotta Gastaldi, Clara Moldovan, Jürgen Brugger, Adrian M. Ionescu, Fully integrated Si:HfO2 Negative Capacitance 2D-2D WSe2/SnSe2 Subthermionic Tunnel FETs, ESSCIRC 2022- IEEE 48th European Solid State Circuits Conference (ESSCIRC), 19-22 September 2022, Milan, Italy.
13. Berke Erbas, Ana Conde-Rubio, Xia Liu, Mitali Banerjee, Marcos Penedo, Georg Fantner, Giovanni Boero, Juergen Brugger, Grayscale nanopatterning for 2D material straining, 48th International conference on micro and nanoengineering (MNE 2022), Sept 19-23, 2022. Leuven, Belgium.
12. X Liu, M Rostami, A Conde Rubio, G Boero, J Brugger, Spontaneous formation of ordered micro-wrinkles on a thermosensitive resist, 47th Micro and Nano Engineering Conference (MNE 2021), Sept 20-23, 2021, Turin, Italy.
11. A Conde Rubio, X Liu, G Boero, J Brugger, Edge-contact MoS2 transistors made by thermal scanning probe lithography, 47th Micro and Nano Engineering Conference (MNE 2021), Sept 20-23, 2021, Turin, Italy.
10. Xia Liu, Samuel Tobias Howell, Ana Conde-Rubio, Giovanni Boero, Juergen Brugger. Thermomechanical nanocutting of 2D materials using thermal scanning probe lithography, CMD2020GEFES, 2020 joint conference of the condensed matter divisions of EPS_CMD and RSEF-GEFES, Online, 31st August - 4th September, 2020.
9. Xia Liu, Arnob Islam, Philip X.L. Feng*. Few-layer MoTe2 suspended channel transistors and nanoelectromechanical resonators, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019), June 23-27, 2019, Berlin, Germany, page 2408-2411.
8. Xia Liu*, Juergen Brugger, Xiaohong Wang. Self-charging energy harvesting system for wearables, the European Materials Research Society (E-MRS 2019 Spring), May 27-31, 2019, Nice, France.
7. Xia Liu, Xiaohong Wang*, Cardiomyocytes driven piezoelectric nanofiber generator with anisotropic enhancement, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS 2016), January 24-28, 2016, Shanghai, China, page 1189–1192.
6. Xia Liu, Xiaohong Wang*, Song Li, Liwei Lin, Energy harvesting using uniaxially aligned cardiomyocytes, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014), January 26-30, 2014, San Francisco, USA, page 159–162.
5. Xia Liu, Xiaohong Wang*, Hui Zhao, Yanan Du, Myocardial cell pattern on piezoelectric nanofiber mats for energy harvesting, 14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2014), November 18–21, 2014, Awaji Island, Hyogo, Japan.
4. Hao Jia, Xia Liu, Philip X.-L. Feng*. Manipulating and patterning micro/nanoparticles in liquid using multimode membrane resonators, 2018 IEEE Biomedical Circuits and Systems Conference (BioCAS 2018), Cleveland, USA, page 1–4.
3. Arnob Islam, Xia Liu, Bradley Odhner, Mary Anne Tupta, Philip X.-L. Feng*. Investigation of electrostatic gating in two-dimensional transitional metal dichalcogenide (TMDC) field effect transistors (FETs), 2018 IEEE 13th Nanotechnology Materials and Devices Conference (NMDC 2018), Portland, USA, page 1–4.
2. Sixing Xu, Wei Liu, Xia Liu, Xuanlin Kuang, W. Liu, Xiaohong Wang*. A Mxene based all-solid-state microsupercapacitor with 3D interdigital electrode, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Taiwan, China, page 706–709.
1. Xuanlin Kuang, Xia Liu, Sixing Xu, Xiaohong Wang*. Silicon enclosed in rGO/CNT shell-like scaffold as a micro lithium-ion battery anode, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Taiwan, China, page 714–717.
專著
1. 劉霞，心肌細胞驅動的能量收集器及超高壓電性納米纖維研究，清華大學出版社出版。
研究成果
1. 通過製備納米灰度結構襯底實現對單層MoS2的應變控制可以顯著改善其電學性能。與未應變的MoS2晶體管相比，具有應變的MoS2晶體管的開啟電流增加了8倍，室溫下遷移率提升至185 cm2/Vs。這一方法為基於應變工程的二維材料物性調控提供了創新的技術路徑，具有顯著的應用潛力。該研究展示的應變工程方法在提升二維材料晶體管遷移率方面表現出顯著效果，為未來高性能二維材料晶體管的設計提供了新的路徑。通過可編程的灰度納米結構控制應變分布，提升了器件電學性能。由於應變能夠影響MoS2的光學特性，該技術同樣適用於高效光電器件和量子計算器件的製造。
Xia Liu,* et al., Nature Communications 15, 6934 (2024).
Berke Erbas, Ana Conde-Rubio,* Xia Liu,* et al., Microsystems & Nanoengineering (2024)10:28.
Mohammadreza Rostami,…, Xia Liu,* and Juergen Brugger, Advanced Science, 2023, 2303518.
2. 將掃描熱探針技術（t-SPL）與干法刻蝕工藝相結合，製備高分辨率、高縱橫比灰度結構的可行性。該研究通過電感耦合等離子體反應刻蝕將t-SPL工藝在PPA層上製造的淺層灰度結構轉移到SiO2襯底上，並分別對比了壓力、不同氣體組分及流速、射頻偏置功率等參數對刻蝕選擇性的影響，通過優化工藝參數，最終使轉移後的灰度結構深度放大了5倍。
Sadegh Kamaei, Xia Liu, et al., Nature Electronics, 2023, 6, 658–668.
Xia Liu, et al., Nano Letters, 2020, 20, 11, 8250–8257.
3. 研發出了面向<1nm厚度的半導體晶體的納米加工技術，實現了無侵入式的，無掩模版，無電子束/離子束的直接圖形化工藝，最小尺寸可達到20nm。與激光直寫技術、電子束/離子束光刻技術相比，此技術對半導體材料性能不產生任何影響，以及避免了使用後續濕法工藝，節省成本和簡化工藝。
Xia Liu, et al., Advanced Materials, 2020, 2001232.
Xia Liu,* et al.,ACS Nano, 2021, 15, 12, 19733–19742.
4. 研究了一種基於熱機械原理的納米探針直寫方法來實現二維晶體的局部應變，精度可達到20nm，可調控其禁帶寬度（最大可調控0.3eV）。這種可調控的應變可永久保留在二維材料中，從而實現性能可調控的器件。這種直寫工藝還可實現大規模加工，從而可直接應用在傳感器、電子器件和集成電路的製備。
Xia Liu, et al., Nano Letters, 2020, 20, 11, 8250–8257.
Xia Liu, et al., ACS Nano, 2020, 14, 2, 1457–1467.
5. 研發了基於非摻雜、非侵入式的方法來調控二維晶體管的p態或n態，利用改變二維晶體與柵極/漏極的肖特基接觸勢壘來製備p態晶體管和n態晶體管。開發了兩種工藝方法，退火和激光直寫，實現了採用同種金屬電極和同種二維晶體的數字邏輯門電路，為實現大規模的二維集成電路做鋪墊。
6. 實現具有超高壓電性的一維柔性納米纖維。該項研究利用比表面積大的二維材料來調控納米聚合物纖維的晶相，極大地提升了聚合物的壓電性能。該研究方法為未來實現不同材料性能的調控提供了很有前瞻性的借鑑。
Xia Liu, et al., ACS Nano, 2017, 11, 1901−1910.
主持課題
主持國家自然科學基金面上項目，主持國家海外高層次人才青年項目
榮獲獎項
2024年，第二屆智能材料與光電子器件研討會，科學創新獎
2024年，北理工優秀「三全育人」導師
2021年，國家高層次青年人才
2018年，青年科學家提名獎，全球微系統與納米工程峰會
2017-2018年，美國凱斯西儲大學Wen Ko Fellowship
2017年，清華大學優秀博士學位論文一等獎（系所唯一，37/全校2000+）
2017年，中國通信學會優秀博士學位論文（全國10個名額）
2017年，北京市優秀畢業生
2016年，清華大學綜合優秀獎學金 — 蔣震獎學金
2015年，清華大學LAM Research獎學金
2014年，清華大學綜合優秀獎學金
2014年，IEEE MEMS 2014優秀論文提名獎
2011年，合肥工業大學優秀畢業生
學術兼職
擔任Transducers 2019、2021會議分會主席和技術委員會委員。擔任ACS Nano, Nano Energy, Advanced Functional Materials, Advanced Science, Microsystems & Nanoengineering, ACS Applied Materials & Interfaces等國際知名期刊審稿人。Chip期刊青年編委。 [1]